AFC700 HIGH MASS FLOW CONTROLLER (Viton , Kalrez Seal)
MFC is an abbreviation of Mass Flow Controller, and it is a device that allows the gas from the gas bottle to flow at a constant flow rate desired by the user. Although the unit varies slightly from manufacturer to manufacturer, the standard Cubic Centimeter per Minutes (SCCM) is commonly used.
Features & Benefits
■ AFC770 (HIGH Mass Flow Controller) is generally designed to be used for semiconductor fixing including industrial applications.
■ AFC770 (HIGH Mass Flow Controller) has a full scale range of 51 SLM to 500 SLM.
■ AFC770 (HIGH Mass Flow Controller) has an error corresponding to 1% of Full Scale.
■ AFC770 (HIGH Mass Flow Controller) is designed as a product that requires little warm-up time.
■ AFC770 (HIGH Mass Flow Controller) uses 9Pin D-sub Connector by default.
■ AFC770 (HIGH Mass Flow Controller) can be used with MFC Power Supply & Display Unit such as GMC1200.
Product
Dimensions
Specifications
Full S cale Ranges (N2 equivalent) | 51 SLM~ 500 SLM |
Maximum lnlet P ressure | 150 psig |
Normal Operating Pressure Differential (with atmospheric pressure at the. MFCoutlet) | 45 to 75 psid |
Control Range | 2% to 100% of F.S |
Accuracy (analog) (including non-linearity, hysteresis, and non-repeata bility referenced to 760mmhg and 0°c) | ±1.0% of F.S |
Repeatability | ±0.2% of F.S |
Resolution | 1.0% of F.S |
Temperature Coefficients Zero Span | <0.05 % of F.S./°C <0.05 % of F.S. |
Warm-up Time (to within 0.2% of F.S. of steady state performance) | < 2 min |
Controller Settling Time | < 2 sec |
Pressure Coefficient | <0.02 % of Rdg./psi |
Normal Operating Temperature Range | 0°C to 50°C |
Input Voltage Required Max. current at start-up (first 2 sec) Typical current at seady state | ±15 VDC(±5%) @ 200 mA +13~30VDC(±5%) @ 300 mA (Option) |
Set Point Command Signal | 0 to 5 VDC (Option 4~20 mA) |
Output Signal | 0 to 5 VDC (Option 4~20 mA) |
Connector Types Analog | 9-pin "D" Type |
REMOTE MODE | RS485 , RS232 |
Wetted Materials Stan dard Optional (seals and valve seat) | 316L S.S. , Vition , Kalrez |
Leak Integrity External (scc/sec He) Through closed valve | <1 x 10(-9) <1.0% of F.S. at 40 psig inlet to atmosphere(Toassure no flow-through, a separate positives shut-off valve is recommended.) |
Fittings (compatible with) | Swagelok 2 VCR, 1/2" Swagelok |
