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Throttle Valve

All Teflon(POCL3)

ATV1000 All Teflon Throttle Valve

The ATV1000 All Teflon Throttle Valve is used to control the pressure in the vacuum chamber.

ATV1000 All Teflon (Throttle Valve) is designed to be compatible with GPC3000 (Auto Pressure Controller).

In particular, it is widely used as a discharge device for semiconductor process manufacturing equipment, characterized in that it is a POCL liquid.

 

Features & Benefits

 ATV1000 All Teflon (Throttle Valve) uses Micro-Stepping Motor and Direct Gear Driver to improve the resolution of the valve.

Can be used semi-permanently.

 ATV1000 All Teflon (Throttle Valve) can be used in connection with the GPC3000 Controller provided by your company, and you can also connect and use the controllers of other companies' products.

 ATV1000 All Teflon (Throttle Valve) is made of Teflon material, so it is specialized from pollution.

 

Product 





Specifications

Speed (open to close)

2.0 sec 

Resolution

1/24000 

Drive Method

Direct gear drive 

Valve Motor Ambient

Operating Temperature

-20 to +40 

Differential Pressure

Across Valve

1 atm. (15psig) max. 

External Leakage at Shaft seal

1x10-8sec/sec He 

Materials Exposed to Process

PTFE, PEEK, Viton

Compatible Controller

Model GPC3000

MKS Type 651, 1651 

Size

i inch Teflon join 

Full Closed Leak (100mmH2O)

 3 l/min