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Smart Exhaust Pressure Controller

ATV3000 Smart Exhaust Pressure Controller

The ATV3000 Exhaust Pressure Controller is used to control the pressure in the vacuum chamber.

It is also manufactured to control a wide range of pressure.

Since the controller and the valve are manufactured in one piece, it can have an effect of reducing the cost by not using an additional controller.

 

Features & Benefits

 ATV3000 Smart Exhaust Throttle Valve uses Micro-Stepping Motor and Direct Gear Driver to improve the resolution of the valve. Can be used semi-permanently.

 ATV3000 Smart Exhaust Throttle Valve uses High Torque Motor, so vacuum line (eg 12 inch) can be installed even in Large Size Chamber.  can be used

 ATV3000 Smart Exhaust Throttle Valve Body can be used even after heating up to 150˚C. (Excluding Sealing Type)

 ATV3000 Smart Exhaust Throttle Valve displays the flapper's position in FND so that the user can check it from the outside to check whether the valve is operating or not.

   It is designed so that it can be checked without being detached from the equipment.

 For ATV3000 Smart Exhaust Throttle Valve, Flange Style can be set when ordering as desired by the customer.  (Flange Style: ISO-NW, ASA, CF, JIS , KF)

 ATV3000 Smart Exhaust Throttle Valve can be used only when DC Power (+24VDC) is supplied from the outside.

 

Product 




 

Specifications

Speed (open to close)

1.5sec 

Resolution

1/12000 

Drive Method

Direct gear drive 

Maximum Valve Body Operating Temperature

Standard 0-100

Optional : 0 - 150 (Note 1) 

Valve Motor Ambient

Operating Temperature

-20 to +40 

Differential Pressure

Across Valve

1 atm. (15psig) max. 

External Leakage at Shaft seal

1x10-8sec/sec He 

Materials Exposed to Process

Standard : 304 S.S., Viton (Note 2)

Optional :316 S.S., Viton (Note 2) 

Visual Position Indicator

FND

Drive Output Torque

(with Model GPC3000 or MKS Type 651)

800 in-oz 

 

Specifications

Speed (open to close)

1.5sec 

Resolution

1/24000 

Drive Method

Direct gear drive 

Maximum Valve Body Operating Temperature

Standard 0-100

Optional : 0 - 150 (Note 1) 

Valve Motor Ambient

Operating Temperature

-20 to +40 

Differential Pressure

Across Valve

1 atm. (15psig) max. 

External Leakage at Shaft seal

1x10-8sec/sec He 

Materials Exposed to Process

Standard : 304 S.S., Viton (Note 2)

Optional :316 S.S., Viton (Note 2) 

Compatible Controller

Model GPC3000

MKS Type 651, 1651 

Drive Output Torque

(with Model GPC3000 or MKS Type 651)

800 in-oz